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pfatehi
searching PlanetScale…
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by
pfatehi
15y ago
"An alternative to the standard methods of building planar MOSFETs has been proposed to help alleviate some of the physical barriers to scaling down existing designs. These proposals involve the construction of three dimensional MOSFETs eit
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by
pfatehi
15y ago
here's another one: "TRI-GATE DEVICE WITH CONFORMAL PVD WORKFUNCTION METAL ON ITS THREE-DIMENSIONAL BODY AND FABRICATION METHOD THEREOF" http://www.freepatentsonline.com/y2008/0157207.html