People have used electron diffraction using cryo-em scopes to do sub-angstrom resolution. For example, my colleague Jose Rodridguez published this a few years a

People have used electron diffraction using cryo-em scopes to do sub-angstrom resolution. For example, my colleague Jose Rodridguez published this a few years ago. https://www.nature.com/articles/s41594-017-0018-0 https://www.nature.com/articles/s41594-017-0018-0