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That's interesting, I saw a hobbyist photo lithography setup the other year that was able to etch metal with a resolution of 20nm.
by swiley 6y ago
That's interesting, I saw a hobbyist photo lithography setup the other year that was able to etch metal with a resolution of 20nm.
- phkahler 6y agoThat's really not possible. 20um probably. Micro not nano.
- MayeulC 6y agoWell, nano would be achievable via e-beam lithography, but photolithography is another beast: I'm pretty sure you need EUV at that size, with special (expensive) lenses that do not absorb the UV.
- anon73044 6y agoI recall this but don't remember seeing anything smaller being posted. Sub 100nm for a hobbiest would be pretty awesome. https://youtu.be/YAPt_DcWAvw https://youtu.be/YAPt_DcWAvw
- imtringued 6y agoState of the art non EUV photo lithography uses light with a 193 nm wavelength. 20nm is significantly below that which would imply usage of highly advanced lithography techniques like multiple patterning. A chip manufactured with a 20nm resolution would involve dozens of masks which were created through electron-beam lithography. Just the mask set alone would cost millions of dollars. The only hobbyist that I am aware of used a pretty nifty mask less technique but the resolution doesn't come close at all. I think you just mixed up your units.
- swiley 6y agoCan't edit this, what I saw was definitely um and not nm.