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It's a vast and complex topic. I once stumbled on the following presentation from ARM: https://community.arm.com/developer/research/b/articles/posts/the-ics-
by yaantc 7y ago
It's a vast and complex topic. I once stumbled on the following presentation from ARM:
https://community.arm.com/developer/research/b/articles/posts/the-ics-of-2030 https://community.arm.com/developer/research/b/articles/post...
The first part covers EUV, which is key to advanced nodes. Then it moves on to more futuristic and tentative techniques. But the EUV part is a nice introduction for non specialist, with pointers to dig if one is interested.
- Dylan16807 7y agoEUV is an amazing nightmare, but the etching part of the process is pretty straightforward. The difficulty is in finding materials that don't absorb it all and/or break constantly. In my mind, the really interesting tricks and hacks are all the ways they've managed to take 193nm light and etch things that are so much smaller than the wavelength.