2 ms·
Or they've moved so damn far into the UV that their photoresist doesn't even care about the wimpy just-beyond-visual peaks coming out of fluorescent lights.
by jjoonathan 10y ago
Or they've moved so damn far into the UV that their photoresist doesn't even care about the wimpy just-beyond-visual peaks coming out of fluorescent lights.
- Dylan16807 10y agoEveryone's still using 193nm light because it's so painful to go further. It's easier to solve the ridiculous problems involved when etching features a twentieth the size of your wavelength.