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You are talking about immersion lithography. It replaces the air gap from the final lens of the lithography system with water which has greater IOR. AMD has bee
by spystath 12y ago
You are talking about immersion lithography. It replaces the air gap from the final lens of the lithography system with water which has greater IOR. AMD has been using it for a while, probably before the 45 nm node. Strangely enough Intel was not using it until the 32 nm node. It's the same hack with oil immersion lenses, basically, for the optical microscopes.
- dzordzduan 12y agoIf you didn't watch this video before... https://youtu.be/NGFhc8R_uO4?t=15m50s https://youtu.be/NGFhc8R_uO4?t=15m50s
- deckar01 12y agoThis is a great presentation on the evolution of transistor manufacturing processes. I didn't know how a transistor worked before watching this video, yet was engaged by the technical narrative of the semiconductor industry overcoming one physical constraint after the other.