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why the jump from 193nm light to 13.5nm light with nothing in between? Would 50nm light for instance basically be exactly as hard as 13.5nm so you just go with
by nazgulnarsil 12y ago
why the jump from 193nm light to 13.5nm light with nothing in between? Would 50nm light for instance basically be exactly as hard as 13.5nm so you just go with the smallest possible?
- driax 12y agoI'm just guessing here. Current technology uses all sorts of tricks to focus/manipulate/use 193nm light so that you can build something smaller than the size of wavelength. However many of these tricks don't work with EUV or bigger but smaller than current light because it has to be done in a vacuum. So basicly you have to go even smaller to be better.