4 ms·
Wow..light involved in the lithography process causes wear on the lenses? To what degree?
by rdl 12y ago
Wow..light involved in the lithography process causes wear on the lenses? To what degree?
- robbiep 12y agoYes - just saw that too. Anyone else able to supply more information on what is going on there? That seems un-possible, but i'm no physicist
- wiredfool 12y agoIt's not just any light, it's pretty serious deep ultraviolet lasers. (one quick google was showing 60-90W pulsed @6khz lasers @ ~200nm wavelength.) Stuff degrades in UV light, and that laser is going to be far brighter than you would have ordinary experience with.
- deleted 12y ago[deleted]
- rdl 12y agoThis video, mentioned here, from HOPE, is amazing: https://m.youtube.com/watch?v=NGFhc8R_uO4 https://m.youtube.com/watch?v=NGFhc8R_uO4
- 0x0 12y agoGreat video worthy of a separate HN story submission!
- spyder 12y agoand here is the direct link to the part about the wear on the lenses: http://youtu.be/NGFhc8R_uO4?t=12m32s http://youtu.be/NGFhc8R_uO4?t=12m32s
- davidb_ 12y agoWow, that's like the entire microelectronics class I took in undergrad compressed into an hour, just without any of the math and (obviously) light on theory. Impressive.
- vibrolax 12y agoI worked for an optical company building complete objective lenses and illuminator optics for steppers using G-line, I-line, and ArF and KrF laser sources. "Solarization" and ablation of the lens coatings was an ongoing problem, especially for UV sources. A stepper objective has 20+ lens elements. Lenses were refurbished by replacing elements as their transmission fell.