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This is awesome. Been thinking of doing the same with an electron gun (hijacked from an old crt) and vacuum chamber.
by aswanson 13y ago
This is awesome. Been thinking of doing the same with an electron gun (hijacked from an old crt) and vacuum chamber.
- akiselev 13y agoSee if you can get a plasma window for that vacuum chamber, which will allow you to do e-beam etching down to about 100nm with the wafer outside of the chamber. Combine it with a DIY 80/20 class 100 cleanroom (if you can make it small enough to be able to manipulate it with isolated gloves then it will be relatively cheap), some precise X-Y linear stages (you can probably get away with +-10nm precision at 100nm), supersonic bath with etching fluid, and a high quality blender for applying the resist and VOILA you have a simple little fab. You can probably adopt some stuff from an SEM to scan the electron beam across the resist but you're probably better off trying to come up with a way of etching through a die long term (much more difficult and slow).