2 ms·
This is not unilaterally true if the devices are simple enough and make process engineering decisions specifically toward the objective of speed. I am not worki
by nfjesifb 12d ago
This is not unilaterally true if the devices are simple enough and make process engineering decisions specifically toward the objective of speed. I am not working on gate arrays and have made NMOS from a virgin p-type wafer in 8hrs. Some ways you can be fast:
- Stock pre implanted wafers with oxide and polysilicon layers grown/deposited in advance to avoid any long furnace cycles at fabrication time.
-Use spin on dopant with rapid thermal anneal furnaces instead of sending wafer to external services for implant whenever possible
- Use SOI wafer and mesa isolation instead of more complicated and time intensive STI or LOCOS techniques
- SOI also gives you the ability to do work function engineering that could allow for junctionless devices, further minimizing need for implant/doping steps because you don't need to form wells in oppositely doped bulk silicon
- Instead of exclusively relying maskless lithography, which inherently means your exposures have to be done in sequence, you can instead rely on a combination of maskless and masked lithography so that as soon as you receive an order, you can start fabrication immediately by doing the first layer on a maskless setup while initiating mask writes for all subsequent layers in parallel across multiple mask writers. This parallelizes the lithography of every layer.
I am happy to talk more specifically if there is any feedback or questions about these points. AMA.