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China begins mass production of homegrown DUV chipmaking tools
- DivingForGold 3mo ago... Immersion DUV prints 28nm-class features in a single exposure and reaches 7nm through multipatterning, at a cost in overlay errors and yield. ... So, this is not EUV, this is still DUV, which still means substantially reduced yield due to overlay errors.
- yogthos 3mo agoYou have to start somewhere.