Cymer builds the EUV light source, but the biggest enabler for High NA EUV is using anamorphic optics (ie asymmetric horizontal and vertical magnification) from

Cymer builds the EUV light source, but the biggest enabler for High NA EUV is using anamorphic optics (ie asymmetric horizontal and vertical magnification) from Zeiss: https://www.asml.com/en/news/stories/2024/5-things-high-na-euv https://www.asml.com/en/news/stories/2024/5-things-high-na-e...