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Inventing EUV lasers.
by IAmBroom 6mo ago
Inventing EUV lasers.
- ghc 6mo agoOptics and photoresist materials too. The partnership developed the first EUV lithography in 2001: https://www.llnl.gov/article/27641/euvl-partnership-makes-its-stand https://www.llnl.gov/article/27641/euvl-partnership-makes-it...