There's Canon with nanoimprint [1] and Rapidus [2] may be working on something [1] https://spectrum.ieee.org/nanoimprint-lithography https://spectrum.ieee.org/

There's Canon with nanoimprint [1] and Rapidus [2] may be working on something [1] https://spectrum.ieee.org/nanoimprint-lithography https://spectrum.ieee.org/nanoimprint-lithography [2] https://www.rapidus.inc/en/ https://www.rapidus.inc/en/