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Prof. Hank Smith of MIT spent decades trying to push X-ray lithography but yes, the industry coalesced around DUV and then EUV. https://dspace.mit.edu/bitstrea
by osnium123 1y ago
Prof. Hank Smith of MIT spent decades trying to push X-ray lithography but yes, the industry coalesced around DUV and then EUV.
https://dspace.mit.edu/bitstream/handle/1721.1/16801/50503702-MIT.pdf?sequence=2 https://dspace.mit.edu/bitstream/handle/1721.1/16801/5050370...