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I don’t have a times subscription but this looks to be Xray lithography using a synchrotron to produce the X-rays? Can anyone confirm?
by czarv20 11mo ago
I don’t have a times subscription but this looks to be Xray lithography using a synchrotron to produce the X-rays? Can anyone confirm?
- LargoLasskhyfv 11mo agohttps://archive.ph/xKqnk https://archive.ph/xKqnk There is also this from out of China: https://pubs.aip.org/aip/app/article/10/8/086105/3357991/Electrohydrodynamic-excimer-laser-Ultra-compact https://pubs.aip.org/aip/app/article/10/8/086105/3357991/Ele... Via: https://phys.org/news/2025-10-electrohydrodynamics-machine-enable-portable-high.html https://phys.org/news/2025-10-electrohydrodynamics-machine-e... Not to forget https://global.canon/en/technology/nil-2023.html https://global.canon/en/technology/nil-2023.html , https://www.usa.canon.com/shop/business/semiconductor/lithography/nanoimprint-lithography https://www.usa.canon.com/shop/business/semiconductor/lithog... which recently went online in https://www.tomshardware.com/tech-industry/canon-delivers-first-nanoimprint-lithography-tool-to-us-institute-backed-by-intel-samsung-darpa https://www.tomshardware.com/tech-industry/canon-delivers-fi... , https://www.eenewseurope.com/en/canon-delivers-5nm-capable-nano-imprint-lithography-machine/ https://www.eenewseurope.com/en/canon-delivers-5nm-capable-n... , https://global.canon/en/news/2024/20240926.html https://global.canon/en/news/2024/20240926.html , https://spectrum.ieee.org/nanoimprint-lithography https://spectrum.ieee.org/nanoimprint-lithography OTOH: https://newsletter.semianalysis.com/p/nanoimprint-lithography-stop-saying https://newsletter.semianalysis.com/p/nanoimprint-lithograph... And whatever https://www.searchforthenext.com/ https://www.searchforthenext.com/ & https://semefab.com https://semefab.com claim for their stuff
- zengief 11mo agoThanks for the link. What I'm wondering is how this guy aims to succeed where previous X-ray lithography efforts failed. For reference X-ray litho was competing with EUV. What was it that held the approach back? My guess would be that that the industry simply coalesced around EUV and X-rays were abandoned. But that just makes me wonder why the industry coalesced there. Perhaps synchrotons are not cheap / easy? But don't university labs build these all the time?
- osnium123 11mo agoProf. Hank Smith of MIT spent decades trying to push X-ray lithography but yes, the industry coalesced around DUV and then EUV. https://dspace.mit.edu/bitstream/handle/1721.1/16801/50503702-MIT.pdf?sequence=2 https://dspace.mit.edu/bitstream/handle/1721.1/16801/5050370...
- LargoLasskhyfv 11mo agoAs far as I understand it real X-Rays are too hard to handle in general, and though more precise because of shorter wavelengths etch too much away from the substrates. EUV is just soft enough, to not do that(as much). That seems to be the main reason all the effort went into EUV of 'just the right wavelength and energy.'
- dreamcompiler 11mo agoThat searchforthenext link shows an illustration captioned "Conventional CMOS unipolar NOR gate." It's actually a NAND gate. Seems like a pretty big red flag if they want to revolutionize transistors but they can't even get super basic stuff right.