3 ms·SF6? The DRIE etchant gas?by numpad0 1y agoSF6? The DRIE etchant gas?b3orn 1y agoYes, but for DRIE you need plasma so you ionise it.pfdietz 1y agoAnother fluorinated greenhouse gas used in etching is nitrogen trifluoride. It's second only to SF6 in its GWP.