NF3 is very different than the other nitrogen halides and used as a silicon etchant, but re: environmental concerns, perhaps you're confusing it with something

NF3 is very different than the other nitrogen halides and used as a silicon etchant, but re: environmental concerns, perhaps you're confusing it with something else? It's an extremely potent greenhouse gas that persists in the atmosphere for centuries. (https://en.wikipedia.org/wiki/Nitrogen_trifluoride#Greenhouse_gas https://en.wikipedia.org/wiki/Nitrogen_trifluoride#Greenhous...) Surprisingly less toxic than some other gases used in the semiconductor industry though!