3 ms·

I have no idea how much power an EUV source consumes, but I’m surprised to hear that it’s more than a handful of kW. What’s the right ballpark?

brohee 2y ago
ASML says 1.3 MW for a single system. So off by three orders of magnitude. https://www.asml.com/en/news/stories/2024/a-sustainability-mindset https://www.asml.com/en/news/stories/2024/a-sustainability-m...
- jsjohnst 2y ago
  Thanks for sharing the link! 1.3MW really isn’t that high of a load though. Thats a very straightforward load to be able to support via diesel generators. As an example, a typical large datacenter uses an order of magnitude more power, yet stays online following a grid outage.
  - deleted 2y ago
    [deleted]
  - pfdietz 2y ago
    It's 1743 horsepower.
    - jsjohnst 2y ago
      Yep, you did the simple math. 2MW generators are rather common place, they even come in portable (as in on a trailer) form.
  - bob1029 2y ago
    This is the power consumed by the light source for one photo tool on one line. There are thousands of tools. Material handling robots, compressors, HVAC, pumps, an entire data center within the factory, etc.
    - jsjohnst 2y ago
      > This is the power consumed by the light source for one photo tool on one line. Actually, it’s not if you read the linked article. Try harder with your indignant reply next time to an entirely factual post. Sheesh! Further, here’s a >one hundred megawatt generator installation (yes, used, but it’s always call for quote otherwise online) for a small fraction of the price of the EUV machine in case I need to further prove my point. https://www.uspeglobal.com/listings/1705462-used-100-mw-2004-used-caterpillar-16cm32c-hfo-fired-diesel-power-plant-generator-sets https://www.uspeglobal.com/listings/1705462-used-100-mw-2004... There’s also multiple GE LMS100 generators installed in Texas and they each provide ~115MW of power. So not unprecedented for installation in the state either!
    - jsjohnst 2y ago
      From source article… > For example, a lot of that 1.3 MW went into cooling the system and handling the hydrogen flow used to prevent contamination build up.
justlikereddit 2y ago
>They require up to 10.2 gigawatt hours per tool annually First hit off google. Assuming they run them 24/7 that amounts to a power usage a bit over 1 megawatt, but they could be pulsed for all I know and use quite a bit more

brohee 2y ago

ASML says 1.3 MW for a single system. So off by three orders of magnitude. https://www.asml.com/en/news/stories/2024/a-sustainability-mindset https://www.asml.com/en/news/stories/2024/a-sustainability-m...

jsjohnst 2y ago
Thanks for sharing the link! 1.3MW really isn’t that high of a load though. Thats a very straightforward load to be able to support via diesel generators. As an example, a typical large datacenter uses an order of magnitude more power, yet stays online following a grid outage.
- deleted 2y ago
  [deleted]
- pfdietz 2y ago
  It's 1743 horsepower.
  - jsjohnst 2y ago
    Yep, you did the simple math. 2MW generators are rather common place, they even come in portable (as in on a trailer) form.
- bob1029 2y ago
  This is the power consumed by the light source for one photo tool on one line. There are thousands of tools. Material handling robots, compressors, HVAC, pumps, an entire data center within the factory, etc.
  - jsjohnst 2y ago
    > This is the power consumed by the light source for one photo tool on one line. Actually, it’s not if you read the linked article. Try harder with your indignant reply next time to an entirely factual post. Sheesh! Further, here’s a >one hundred megawatt generator installation (yes, used, but it’s always call for quote otherwise online) for a small fraction of the price of the EUV machine in case I need to further prove my point. https://www.uspeglobal.com/listings/1705462-used-100-mw-2004-used-caterpillar-16cm32c-hfo-fired-diesel-power-plant-generator-sets https://www.uspeglobal.com/listings/1705462-used-100-mw-2004... There’s also multiple GE LMS100 generators installed in Texas and they each provide ~115MW of power. So not unprecedented for installation in the state either!
  - jsjohnst 2y ago
    From source article… > For example, a lot of that 1.3 MW went into cooling the system and handling the hydrogen flow used to prevent contamination build up.

justlikereddit 2y ago

>They require up to 10.2 gigawatt hours per tool annually First hit off google. Assuming they run them 24/7 that amounts to a power usage a bit over 1 megawatt, but they could be pulsed for all I know and use quite a bit more