I think you're right that 1µm was meant given the orders of magnitude in other sources e.g. 200µm -> 0.3µm in this white paper: https://www.cadence.com/en_US/h

I think you're right that 1µm was meant given the orders of magnitude in other sources e.g. 200µm -> 0.3µm in this white paper: https://www.cadence.com/en_US/home/resources/white-papers/thermal-analysis-3d-stacking-beol-technologies.html https://www.cadence.com/en_US/home/resources/white-papers/th...