Yes, electron-beam lithography is fantastic but also fantastically slow. Sorta like building a Lego model brick by brick vs layer by layer. It's still used for

Yes, electron-beam lithography is fantastic but also fantastically slow. Sorta like building a Lego model brick by brick vs layer by layer. It's still used for reticle fabrication and repair. https://en.wikipedia.org/wiki/Electron-beam_lithography https://en.wikipedia.org/wiki/Electron-beam_lithography Edit: Confused SEMs and STMs, but the principle described above applies to both.