Love me some FELs. Pretty sure they did try this, but determined it to be too large and costly for the technology of the time. https://www.asianometry.com/p/eu

Love me some FELs. Pretty sure they did try this, but determined it to be too large and costly for the technology of the time. https://www.asianometry.com/p/euv-lithography-but-with-a-free-electron https://www.asianometry.com/p/euv-lithography-but-with-a-fre... https://www.euvlitho.com/2017/P18.pdf https://www.euvlitho.com/2017/P18.pdf