3 ms·
It might be as simple as the fact that anything the electrons hit will pick up a huge electric charge. Now you've got ESD problems from hell, not to mention un
by CamperBob2 2y ago
It might be as simple as the fact that anything the electrons hit will pick up a huge electric charge. Now you've got ESD problems from hell, not to mention unwanted X-ray generation.
- gaze 2y agoyou can use an anti-charging layer for e-beam litho, that's not such a big deal. E-beam litho is just very slow. There are lithography techniques that use synchrotron sources like LIGA.