Other posters have given the answer but here is the answer in an informative podcast released just over a month ago with some details on the development process

Other posters have given the answer but here is the answer in an informative podcast released just over a month ago with some details on the development process from some ASML PR folks in San Diego (they have offices in the USA). https://www.npr.org/2024/11/13/1212604208/asml-euv-extreme-ultraviolet-lithography-microchips https://www.npr.org/2024/11/13/1212604208/asml-euv-extreme-u...