All the process steps are limited by wafers for hour. Lithography (esp EUV) might be slightly faster, but that's not 30% of total steps, since you generally hav

All the process steps are limited by wafers for hour. Lithography (esp EUV) might be slightly faster, but that's not 30% of total steps, since you generally have deposit and etch/implant for every lithography step. It's close to a dead loss in process cost.