4 ms·
You’re forgetting about 2 decades of US DoE funding of EUV research through EUV-LLC which ASML joined late. A lot of the early groundwork and foundational resea
by cromwellian 2y ago
You’re forgetting about 2 decades of US DoE funding of EUV research through EUV-LLC which ASML joined late. A lot of the early groundwork and foundational research was done by DoE including using US built synchrotron accelerators to try out various early approaches.
- looofooo0 2y agoYes, I think the route was Soviet Union, Japan, USA, Europe.