Indeed, synchrotron sources are considered to be a possible light source for lithography. China is especially interested in them, since they can be done with a

Indeed, synchrotron sources are considered to be a possible light source for lithography. China is especially interested in them, since they can be done with a homegrown technology: https://www.eenewseurope.com/en/chinas-synchrotron-euv-litho-light-source-is-no-sanctions-buster/ https://www.eenewseurope.com/en/chinas-synchrotron-euv-litho... From what I understand, tin-based sources are easier to work with because they are point-like. All the energy is produced from a tiny droplet. Synchrotron sources produce much wider beams, that need to be re-focused properly.