I wonder how big the wafers can be in the NIL system. It definitely sounds like the larger the wafer, the more problems you will have with deformation, alignmen

I wonder how big the wafers can be in the NIL system. It definitely sounds like the larger the wafer, the more problems you will have with deformation, alignment etc. if they have to reduce the wafer size in then that would also affect their ability to compete with EUV.