3 ms·
Current EUV sources from ASML are 13.5nm IIRC. It's increasingly difficult to do any kind of optics (focusing, masks, or even mirrors) at shorter wavelength.
by phkahler 2y ago
Current EUV sources from ASML are 13.5nm IIRC. It's increasingly difficult to do any kind of optics (focusing, masks, or even mirrors) at shorter wavelength.