Canon bought the tech in 2014 after working with the original startups from the 90s: https://www.youtube.com/watch?v=8UdNB3ZY4Ks https://www.youtube.com/watch?

Canon bought the tech in 2014 after working with the original startups from the 90s: https://www.youtube.com/watch?v=8UdNB3ZY4Ks https://www.youtube.com/watch?v=8UdNB3ZY4Ks Since the tech can't compete with EUV in volume, their market is probably niche/lower production runs at a significantly lower install price.