It's definitely lithography on silicon wafers, but a lot of the details are very different. For example, it's pretty common for power devices to be manufactured

It's definitely lithography on silicon wafers, but a lot of the details are very different. For example, it's pretty common for power devices to be manufactured to be formed from the full thickness of the wafer, as opposed to just on the surface. And a single device tends to be formed of many repeating blocks, since you do need fine details still to get the performance (And a lot of the challenge is making sure each of those blocks is as similar as possible, so you don't get hot-spots). (silicon lithography is more of a broad range of processes: digital vs analog vs power vs MEMS all have very different needs, and so a process designed for one will look very different to another, and one designed to allow multiple will be making compromises)