From what I understand, mostly yes. They are still built up layer-by-layer with standard litho techniques, with pattern masks, ion implantation for the p- and n

From what I understand, mostly yes. They are still built up layer-by-layer with standard litho techniques, with pattern masks, ion implantation for the p- and n-type layers, etching, CVD to deposit insulation material (for the 'insulated gate' part of the device). Though they don't have to be nearly as precise, as I understand it as something more sophisticated, like a cpu, they still need to lean on those to make it chooch.