4 ms·
A lot of the tricks used on 193 immersion tools for lithography scaling requires sophisticated deposition and etch processes which are not available on old 6 in
by osnium123 2y ago
A lot of the tricks used on 193 immersion tools for lithography scaling requires sophisticated deposition and etch processes which are not available on old 6 inch tools. Given that this factory was used for faceID parts, I suspect it was making VCSELs or other optoelectronics. These components don’t require fine lithography so it’s probably a 0.35 um capable fab.