3 ms·
Chinese chip making files new EUV patent
- alecco 2y agoSorry about the title's grammar. I made a mistake when shrinking it to fit the limit. Chinese chip making shows progress with new EUV patent from domestic lithography champion The patent from Shanghai Micro Electronics Equipment is still under review, but producing EUV tools in China would break a monopoly held by ASML https://archive.ph/WqeWI https://archive.ph/WqeWI