Indeed, I was wrong, thanks for the correction. From Wikipedia: > In 1997, ASML began studying a shift to using extreme ultraviolet and in 1999 joined a conso

Indeed, I was wrong, thanks for the correction. From Wikipedia: > In 1997, ASML began studying a shift to using extreme ultraviolet and in 1999 joined a consortium, including Intel and two other U.S. chipmakers, in order to exploit fundamental research conducted by the US Department of Energy. Because the CRADA it operates under is funded by the US taxpayer, licensing must be approved by Congress.