I got interested and started googling. Guess what I have found: "The EUV story begins in the mid-1980s in Japan when, building on multilayer mirror research don

I got interested and started googling. Guess what I have found: "The EUV story begins in the mid-1980s in Japan when, building on multilayer mirror research done in Russia in the 70s, Hiroo Kinoshita projected the first EUV images." [0] [0] https://www.asml.com/en/news/stories/2022/making-euv-lab-to-fab https://www.asml.com/en/news/stories/2022/making-euv-lab-to-...