3 ms·

> More precisely, DUV has about 10x shorter wavelength than EUV Other way around, though 10x shorter is confusing; I suggest saying EUV has a wavelength that's

by mlyle 2y ago

> More precisely, DUV has about 10x shorter wavelength than EUV Other way around, though 10x shorter is confusing; I suggest saying EUV has a wavelength that's about 1/10th of DUV.