5 ms·
More precisely, DUV has about 10x shorter wavelength than EUV -- where wavelength directly corresponds to minimum feature size.
by klyrs 2y ago
More precisely, DUV has about 10x shorter wavelength than EUV -- where wavelength directly corresponds to minimum feature size.
- mlyle 2y ago> More precisely, DUV has about 10x shorter wavelength than EUV Other way around, though 10x shorter is confusing; I suggest saying EUV has a wavelength that's about 1/10th of DUV.