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For those like me who don't know these acronyms: DUV = Deep Ultraviolet EUV = Extreme Ultraviolet And they are different methods of lithography. To quote a
by ziddoap 2y ago
For those like me who don't know these acronyms:
DUV = Deep Ultraviolet
EUV = Extreme Ultraviolet
And they are different methods of lithography.
To quote a random site that I googled while looking for the acronyms:
>Think of EUV as a precision scalpel, capable of carving out the finest details, while DUV is more like a skilled artist's brush – versatile and reliable, but with limitations when it comes to the tiniest features.
- klyrs 2y agoMore precisely, DUV has about 10x shorter wavelength than EUV -- where wavelength directly corresponds to minimum feature size.
- mlyle 2y ago> More precisely, DUV has about 10x shorter wavelength than EUV Other way around, though 10x shorter is confusing; I suggest saying EUV has a wavelength that's about 1/10th of DUV.
- chasil 2y agoThe current technology to generate extreme ultraviolet involves a container of molten/liquid tin that is released drop by drop; these are vaporized by a laser. The equipment for this is sold by one vendor, ASML (a company in the Netherlands). It is extremely expensive. https://en.m.wikipedia.org/wiki/Extreme_ultraviolet_lithography https://en.m.wikipedia.org/wiki/Extreme_ultraviolet_lithogra... A Japanese advance was reported on HN recently that could simplify EUV. https://news.ycombinator.com/item?id=41336690 https://news.ycombinator.com/item?id=41336690
- alexpetralia 2y agoIf you want to learn more about this amazing process, I recommend "Material World" by Ed Conway!
- chasil 2y agoI just found this one. https://m.youtube.com/watch?v=h_zgURwr6nA https://m.youtube.com/watch?v=h_zgURwr6nA Edit: I didn't realize that the droplets are hit twice by different lasers. https://m.youtube.com/watch?v=5Ge2RcvDlgw https://m.youtube.com/watch?v=5Ge2RcvDlgw