There's another light source that isn't nearly as hard and actually delivers better quality light at far higher electrical efficiency... It's just large and mos

There's another light source that isn't nearly as hard and actually delivers better quality light at far higher electrical efficiency... It's just large and most of the cost is in the large machine that's kept under vacuum. GloFo was working on doing EUV with that (they gave up on EUV), and Japan was or is recently working on a small demonstrator fab with iirc about 10 steppers, starting with the light source machine. That machine btw is called "free electron laser", and utilizes relativistic electrons to match their velocity to free-space photons instead of the slowed-down-by-metal-helix traveling-wave-tube-amplifiers that power most TV satellites. Those work at about 10 GHz or 30mm wavelength, much larger than the 13nm band used for EUV lithography. FELs can have efficiencies in the double digit % if built with energy recovery, btw.