11 ms·
This has already been debunked. "As it turns out, however, EUV monopolist ASML and its optics suppliers Zeiss have already considered similar setups. “Zeiss ha
by phonon 2y ago
This has already been debunked.
"As it turns out, however, EUV monopolist ASML and its optics suppliers Zeiss have already considered similar setups. “Zeiss has several designs available with similar/better performance than the Shintake design,” an ASML spokesperson told Bits&Chips. So far, these haven’t generated chipmakers’ interest due to the reduced resolution and smaller field size of the design. Should this change in the future, “we will explore whether one of Zeiss’ systems makes sense.”"
https://bits-chips.nl/article/despite-superior-efficiency-japanese-four-mirror-euv-setup-unlikely-to-make-waves/ https://bits-chips.nl/article/despite-superior-efficiency-ja...