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It's interesting that the author's picture is with a linear accelerator. It's quite possible to use a linear accelerator to generate EUV to etch chips. It's bee
by Animats 2y ago
It's interesting that the author's picture is with a linear accelerator. It's quite possible to use a linear accelerator to generate EUV to etch chips. It's been done as a test at SLAC.[1] But that approach was more expensive than AMSL's, since it needed a mile-long accelerator.
There was a startup in Fremont, Lyncean Technologies, that had a 10 watt EUV source based on a small synchrotron.[2][3]
They supposedly got to 10 watts. But that was too weak for EUV semiconductor work.
They struggled for years to find a market, and went bankrupt in 2022. Here's the video of the equipment auction.[4]
If, with this new optical system, only 20 watts are needed, that technology is worth reviving.
Something YC might be interested in.
An accelerator source is much cleaner than the laser tin-zapping thing AMSL uses. It's amazing that works as a commercial product.
[1] https://euvlsymposium.lbl.gov/pdf/2014/39af88b9d637418d86614e7d2f4862ea.pdf https://euvlsymposium.lbl.gov/pdf/2014/39af88b9d637418d86614...
[2] https://web.archive.org/web/20220119174924/https://lynceantech.com/products/#compact-light-source https://web.archive.org/web/20220119174924/https://lynceante...
[3] https://www.euvlitho.com/2017/P17.pdf https://www.euvlitho.com/2017/P17.pdf
[4] https://www.youtube.com/watch?v=D5eGyeNgCSY https://www.youtube.com/watch?v=D5eGyeNgCSY
- rramadass 2y ago> the laser tin-zapping thing ASML uses. The Science/Engineering to make this work is nothing short of magic! There are actually two lasers; the first one to reshape the spherical tin droplet to concave shape and the second one to vaporize it to plasma generating EUV range light. The Extreme Engineering of ASML’s EUV Light Source by Asianometry - https://www.youtube.com/watch?v=5Ge2RcvDlgw https://www.youtube.com/watch?v=5Ge2RcvDlgw