4 ms·
Yeah but then it's a bit the end of the road, since there are no workable refractive media for EUV, not even on paper, which categorically rules out higher NA o
by formerly_proven 2y ago
Yeah but then it's a bit the end of the road, since there are no workable refractive media for EUV, not even on paper, which categorically rules out higher NA optics, which was half the reason for why ArF was able to be used for about 20 years.