2 ms·
The industry moved to 300mm 25 years ago. It’s going to take a lot to get off that standard. Also, round chambers for etch and deposition are good for homogene
by smokefoot 2y ago
The industry moved to 300mm 25 years ago. It’s going to take a lot to get off that standard.
Also, round chambers for etch and deposition are good for homogeneity. I can imagine square chambers would result in lots of process challenges.