3 ms·
I'm facing an engineering problem that amounts to stresses accumulating on the edges of a layered substrate. Are there any references, process notes, books, or
by daniel_reetz 2y ago
I'm facing an engineering problem that amounts to stresses accumulating on the edges of a layered substrate. Are there any references, process notes, books, or industry approaches that you could point me to? High level and/or general are OK.
- newswasboring 2y agoLithography takes a more abstract approach to it, we are not actually calculating stresses, we have pretty powerful sensors which measure the wafer surfaces and then my department models the surface.
- brennanpeterson 2y agoLithography lives in the thin film approximation anyway. Timiosheko is a good reference. There are papers from Barnett or Nix that are very nice, but edges will probably end up a fem solver domain.
- ngneer 2y agoHandbook of Thin Film Deposition (Seshan)