3 ms·
Spin coat as a circle then cut out a rectangle perhaps? I have no idea where the costs end up
by klysm 2y ago
Spin coat as a circle then cut out a rectangle perhaps? I have no idea where the costs end up
- mensetmanusman 2y agoWhen you care about nanometers of thickness variation the gap always matters.
- logtempo 2y agoAt this point just keep going with circle wafers.