NA is Numerical Aperture https://www.asml.com/en/technology/lithography-principles/lenses-and-mirrors#:~:text=Numerical%20aperture,optics%20can%20collect%20and

NA is Numerical Aperture https://www.asml.com/en/technology/lithography-principles/lenses-and-mirrors#:~:text=Numerical%20aperture,optics%20can%20collect%20and%20focus https://www.asml.com/en/technology/lithography-principles/le....