Since we're talking about chip fabs as strategic military assets, I'm curious how vulnerable they are to sabotage. E.g., how difficult would it be for a nation

Since we're talking about chip fabs as strategic military assets, I'm curious how vulnerable they are to sabotage. E.g., how difficult would it be for a nation state to damage one in a way that requires a major replacement part from ASML, with long lead time? And with or without it clearly being an intentional act of sabotage?