I would guess based on their description this is not expensive or precise...at least compared to the cleanroom tooling like an EUV tool. This is probably a gas

I would guess based on their description this is not expensive or precise...at least compared to the cleanroom tooling like an EUV tool. This is probably a gas tower that is used to produce high purity gas on site (like N2). They are large and often transported from where they are built. TSMC AZ had one delivered from Texas a few years ago (or more precisely Linde had it delivered to their site next door to TSMC AZ). You can see the large towers in the pictures linked below. https://www.phxind.com/projects/linde-spectra-30 https://www.phxind.com/projects/linde-spectra-30