EUV was supposed to ship in the early 2000s and the work on it started in earnest the 90s. It turned out that EUV is way harder than anyone imagined. The only r

EUV was supposed to ship in the early 2000s and the work on it started in earnest the 90s. It turned out that EUV is way harder than anyone imagined. The only reason we did stuff like immersion DUV was because we couldn’t get EUV to work.